IPLTSECS - 2605PL

NanoSOI Photonics Fabrication Service

• MPW Submission # 2445
• Substrate: Silicon Nitride 400 nm (4.5 μm BOX)
• Layout Name: IPLTSEC2 (multimode_edge_coupler_JLPR_ETS_COPL_ANT_2_V2_fQlaGSN.gds)
• Includes 20 SEM images in total
• Includes 3.0 micron oxide cladding
• Includes deep trenches for edge coupling

Total Cost: $2,495.00

FABrIC Support, managed by CMC: $873.25

Research Contribution, with research subscription:  $1,621.75

$1,621.75

IPLRSCM1 - 2603PL

NanoSOI Photonics Fabrication Service - MPW Submission # 2347

- Substrate: Silicon Nitride 400 nm (4.5 μm BOX)

- Includes 3.0 micron oxide cladding

- Includes tri-layer metallization

- Includes deep trenches for edge coupling

Total Cost: $3,302.00

FABrIC Support, managed by CMC: $1,155.70

Research Contribution, with research subscription:  $2,146.30

$2,416.30

IPLQUDEN - 2605PL

NanoSOI Photonics Fabrication Service

• MPW Submission # 2446
• Substrate: Silicon Nitride 400 nm (4.5 μm BOX)
• Layout Name: IPLQUDEN (denali_v3_c2uN7Jh.gds))
• Includes 3.0 micron oxide cladding
• Includes deep trenches for edge coupling
• Includes oxide window opening (Layer 6)
• Includes custom dicing into 2 sub-dies in total

Total Cost: $4,315.00

FABrIC Support, managed by CMC: $1,510.25

Research Contribution, with research subscription:  $2,804.75

$2,804.75