NanoSOI Photonics Fabrication Service - MPW Submission # 2347
- Substrate: Silicon Nitride 400 nm (4.5 μm BOX)
- Includes 3.0 micron oxide cladding
- Includes tri-layer metallization
- Includes deep trenches for edge coupling
Total Cost: $3,302.00
FABrIC Support, managed by CMC: $1,155.70
Research Contribution, with research subscription: $2,146.30
