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IPJQUMTP - 2602PJ

- Substrate: Silicon 220 nm (2 μm BOX)

- Includes 10 SEM images in total

- Includes 2.2 micron oxide cladding

- Includes custom dicing into 4 sub-dies in total

Oxide Window Openings (Dedicated)

- 100 +/- 50 nm of oxide remaining over features


Total Cost:  $3,744.00

FABrIC Contribution, managed by CMC:  $1,310.40

Researcher Contribution, with FABriC Membership & Research Subscription:  $2,433.60

$2,433.60

2601LE - ILEWTPIN

2  - 20mm x 20mm tiles subdiced as follows:

  • ILEWTPIN
  • ILEWTMBS
  • ILEWTTRI

CMC will provide one-time support of the sub-dicing costs ($500.00).  

$4,226.00

IPJQUWHI - 2602PJ

Substrate: Silicon 220 nm (2 μm BOX)

- Waveguide area: 0.77 mm2

- Includes 10 SEM images in total


Total Cost:  $1,861.00

FABrIC Contribution, managed by CMC:  $651.35

Researcher Contribution, with FABriC Membership & Research Subscription:  $1,209.65

$1,209.65

IPJMGJOE - 2604PJ

NanoSOI Photonics Fabrication Service - MPW Submission # 2372

- Substrate: Silicon 220 nm (2 μm BOX)

- Layout Name: IPJMGJOE_2604PJ (IPJMGJOE_8ITg4pc.GDS)

- Includes 2.2 micron oxide cladding

- Includes tri-layer metallization

- Includes deep trenches for edge coupling

Total Cost:  $3,302.00

FABrIC Contribution, managed by CMC:  $1,155.70

Researcher Contribution, with FABrIC Membership & Research Subscription:  $2,146.30

$2,416.30

IPJMG198 - 2603PJ

NanoSOI Photonics Fabrication Service - MPW Submission # 2321

  • - Substrate: Silicon 220 nm (2 μm BOX)
  • - Layout Name: IPJMG198 (IPJMG198_2603PJ_v3_4LuzR4k.GDS)
  • - Includes 2.2 micron oxide cladding
  • - Includes tri-layer metallization
  • - Includes deep trenches for thermal isolation trenches

Total Cost: $3,334.00

FABrIC Support, managed by CMC: $1,166.90

Research Contribution, with research subscription:  $2,167.10


$2,167.10

IDKA6PS1 - 2601DK / GF MPW0380

GF 28nm - 4.2mm x 3.8mm

GLOBALFOUNDRIES 28nm process technology offers a HKMG platform to support logic, analog and RF.

Deliverable:  100 bare die

$193,004.28