ANT - NanoSOI Photonics Fabrication Service - MPW Submission # 2332
- Substrate: Silicon 220 nm (2 μm BOX) - Layout Name: TII_May12 (ANT4_SOI_20May2026_corrected_ONiIXTB.gds) - Waveguide area: 0.97 mm2 - Includes 595 SEM images in total - Includes 2.2 micron oxide cladding - Includes tri-layer metallization - Includes deep trenches for edge coupling - Includes custom dicing into 4 sub-dies in total - 3 hours engineering support
$11,934.00