- Substrate: Silicon 220 nm (2 μm BOX)
- Layout Name: TII_May12 (ANT4_SOI_20May2026_corrected_ONiIXTB.gds)
- Waveguide area: 0.97 mm2
- Includes 595 SEM images in total
- Includes 2.2 micron oxide cladding
- Includes tri-layer metallization
- Includes deep trenches for edge coupling - Includes custom dicing into 4 sub-dies in total
- 3 hours engineering support