Micralyne MicraGEM-Si is a silicon-on-insulator (SOI) based MEMS process for manufacturing devices such as micromirrors, optical switches, resonators, inertial, and bio sensors.
MicraGEM-Si is being offered as Multi-Project-Wafer (MPW) service through CMC Microsystems and is available for both academic and industrial R&D. Together CMC and Micralyne offer a seamless path from MPW design confirmation to volume manufacturing.
Features
- Two thick SOI structure layers with up to three functional levels of silicon thickness option
- Gold thin film on top surface for highly reflective mirror and electrical pads
- Available in sizes 4 mm x 4 mm, 4 mm x 8 mm, and 8 mm x 8 mm
This design kit is for Tanner L-Edit software.
Access Conditions and Licensing Requirements:
- Prototyping or Designer subscriber access to the PDK for ACADEMIC purposes is subject to obligations under their respective TUA.
- Non-subscribing Canadian academics or Non-Canadian academics accessing the PDK for ACADEMIC purposes, or Canadian academics and industrial users accessing the PDK for COMMERCIAL purposes, are required to sign a Mutual NDA . Email a copy signed by an authorized representative to licensing@cmc.ca.
Contact the Licensing Administrator at licensing@cmc.ca or 613-530-4787 for more information.
