This is the Teledyne DALSA MIDIS™ design kit for Tanner L-Edit.
The MEMS Integrated Design for Inertial Sensors (MIDIS™) platform is designed to provide a standard process for manufacturing accelerometers and gyroscopes and integrating them into an Inertial Measurement Unit (IMU) for application areas such as consumer (mobile), automotive, aerospace and sports/health markets.
The MIDIS Platform is being offered as Multi-Project-Wafer (MPW) service through CMC Microsystems and is available for both academic and industrial R&D. Together CMC and Teledyne DALSA offer a seamless path from MPW design confirmation to volume manufacturing.
Features
- Getter-free high-vacuum sealing allows resonator Q factors > 20,000
- Efficient wafer-level packaging minimizes overall die size
- 1.5 μm feature size in a 30 μm thick membrane
- Comb height control allows out-of-plane sensing
- TSV allows compact design ready for co-packaging
- Deliver 40 copies for each design
Applications
- Accelerometers
- Gyroscopes
- Resonators
- Inertial sensor combos (Sensor fusion)
Additional Services Available
- CAD tools
- Design kits (Cadence, Coventorware, Tanner/MEMSPro L-Edit)
- Access to CMC support engineers
- Design rule checking services
- Documentation including design handbooks, application notes and design methodologies
- Packaging & assembly services
To access to the Teledyne DALSA PDK download the Teledyne DALSA NDA and email a signed copy to licensing@cmc.ca. Access will be provided once confirmation from Teledyne DALSA is received. Contact the Licensing Administrator at licensing@cmc.ca or 613-530-4787 for more information.
