This document provides information and design rules to be used for design and physical layout of Inertial Sensors manufactured using TELEDYNE DALSA’s 1.5μm, Bulk Silicon Micromachining Inertial Sensors Technology with WLCSP under vacuum.
Design rules presented in this document are based on a process flow status of the time of the release of the document. Before submitting a physical layout, please make sure you are using the most up to date version of the design rules.
