Micralyne MicraGEM-Si is a silicon-on-insulator (SOI) based MEMS process for manufacturing devices such as micromirrors, optical switches, resonators, inertial, and bio sensors.
MicraGEM-Si is being offered as Multi-Project-Wafer (MPW) service through CMC Microsystems and is available for both academic and industrial R&D. Together CMC and Micralyne offer a seamless path from MPW design confirmation to volume manufacturing.
Features
- Two thick SOI structure layers with up to three functional levels of silicon thickness option
- Gold thin film on top surface for highly reflective mirror and electrical pads
- Available in sizes 4 mm x 4 mm, 4 mm x 8 mm, and 8 mm x 8 mm
This Design Handbook contains technology summary and the design rules of the MicraGEM-Si process.
