This application note is developed by Hasan Imam, MSc Candidate, and Yuan Ma, Assistant Professor, both from Electrical and Computer Engineering Department, Dalhousie University, Halifax, NS, in co-operation with CMC Microsystems.
This application note introduces a project involving the design, layout and testing of a magnetically actuated micromirror, fabricated using the Sensonor MultiMEMS multi-project wafer (MPW) process. It is intended to help MEMS researchers who wish to learn more about the MultiMEMS process, or designers who would like to make use of the piezoresistive effect for angle sensing.
All CMC Microsystem account holders with a Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.
