This application note is based on research performed by Ph.D. candidate Abdolreza Rashidi Mohammadi, under the supervision of Dr Mu Chiao, associate professor, at the Department of Mechanical Engineering, The University of British Columbia, Vancouver, BC.
A highly sensitive piezoresistive pressure sensor was developed for use in high temperature applications. This sensor will be used in a kraft pulp digester that requires further action to chemically protect the sensor; chemical protection of the sensor has been developed in a separate project. The sensor was prototyped at Infineon Technologies SensoNor AS, Norway, and characterized in the Microelectromechanical Systems (MEMS) lab at The University of British Columbia. The intended audience for this application note includes researchers who are designing, fabricating and characterizing a MEMS piezoresistive pressure sensor. Other researchers who work on other types of piezoresistive devices with diaphragms may find the application of some interest.
All CMC Microsystem account holders with a Professor Research Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.
