The IMEC silicon process with optical grating for passive waveguide coupling is available from CMC Microsystems. CMC also provides design characterization support that includes optical probe arm assemblies available for short term loan via the CMC test equipment pool. This application note describes the procedure for preparing and using the SUSS MicroTec optical (or, lightwave) probe arm assembly for vertical optical coupling. The probe arm must be used in conjunction with the Quater XYZ 500 series manipulator (or, micropositioner). This assembly is typically used when testing vertical cavity surface emitting lasers (VCSELs), photodiodes, and light-emitting diodes.
