Prepared by Imed Zine-El-Abidine, Senior Applications Engineer, Microfabrication, CMC Microsystems.
This application note provides the procedure to create an electrostatic zipper actuator using a pcell in Cadence Virtuoso. This type of actuator can be built by PolyMUMPs and SOIMUMPs offered by CMC Microsystems; and other custom microfabrication processes.
The intended users of this application note are MEMS designers who wish to use actuators in their device designs.
Items available for download include:
- application note, and
- design file.
All CMC Microsystem account holders with a Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.
