Imed Zine-El-Abidine, Senior Applications Engineer, Microfabrication; and Jim Quinn, Engineer, Prototyping, both of CMC Microsystems.
This application note describes how to use a pcell in Cadence Virtuoso to create electrostatic comb actuators. This type of actuator can be fabricated in the PolyMUMPs and SOIMUMPs technologies, offered by CMC Microsystems through its partner MEMSCAP, or using any custom microfabrication process.
Items available for download include:
- application note
- design file.
All CMC Microsystem account holders with a Professor Research Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.
