Prepared for CMC Microsystems by:
- Luye Mu, Undergraduate Student,
- Abdullah Syed, Undergraduate Student, and
- Patricia Nieva, Professor,
all of Department of Mechanical and Mechatronics Engineering, University of Waterloo.
The galvanic effect is commonly observed when a significant amount of gold is used to fabricate MEMS devices using the MEMSCAP PolyMUMPs (or similar) process. This application note is intended to help researchers eliminate the galvanic effect for devices fabricated in PolyMUMPs. It describes the use of a bent-bridge method to temporarily ground the device to the substrate during fabrication. The solution proposed was developed by the authors of this document and is based on the experimental results presented.
All CMC Microsystem account holders with a Professor Research Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.
