Application Note: Piezoresistive MEMS Strain Sensors: Design and Fabrication Process

Prepared for CMC by:

  • Research group: Advanced MEMS/NEMS Design Facility, Director: Prof. Walied Moussa, Ph.D., P.Eng
  • Graduate student: Ahmed Mohammed; Ph.D. Candidate Mechanical Engineering Department, University of Alberta, Edmonton, Alberta.

 

This application note provides guidelines on how to develop MEMS piezoresistive sensors, particularly MEMS strain (stress) sensors in a NanoFab facility such as the University of Alberta ’s Micro/Nanofabrication Facility (UofA NanoFab). The guidelines will help researchers who wish to build MEMS piezoresistive strain (stress) sensors with stable performance under temperature-varying conditions.

 

All CMC Microsystem account holders with a Professor Research Subscription are authorized to access this application note. For more information contact Linda Dougherty at licensing@cmc.ca or 613-530-4787.

 

Application Note: Piezoresistive MEMS Strain Sensors: Design and Fabrication Process

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